GENEVA, July 31 -- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD. filed a patent application (CN2026/071617) for “FLOW RATE DETECTION METHOD, FLUID PUMP, AND TANK-TYPE SEMICONDUCTOR CLEANING DEVICE”. With publication no. WO/2026/158046, here are the other details related to the patent application:

Kind: Initial Publication with ISR [A1]

IPC: G01F 11/02

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

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