GENEVA, July 18 -- CANON TOKKI CORPORATION filed a patent application (JP2025/043916) for “FILM-FORMING APPARATUS, FILM-FORMING METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE”. With publication no. WO/2026/150741, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: C23C 14/50
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
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