International Patent: FILM DEPOSITION DEVICE, FILM DEPOSITION METHOD, AND PRODUCTION METHOD

GENEVA, June 26 -- CANON TOKKI CORPORATION filed a patent application (JP2025/041507) for “FILM DEPOSITION DEVICE, FILM DEPOSITION METHOD, AND PRODUCTION METHOD”. With publication no. WO/2026/121131, here are the other details related to the patent application:

Kind: Initial Publication with ISR [A1]

IPC: C23C 14/04

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

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