International Patent: FILLING RECESSED FEATURES WITH CARBON-CONTAINING MATERIALS

GENEVA, Sept. 24 -- LAM RESEARCH CORPORATION filed a patent application (US2026/019955) for “FILLING RECESSED FEATURES WITH CARBON-CONTAINING MATERIALS”. With publication no. WO/2026/198794, here are the other details related to the patent application:

Kind: Initial Publication with ISR [A1]

IPC: C23C 16/26

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

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