International Patent: EQUAL MATCHING OF OXIDATION RATE BETWEEN SIGE AND SI THROUGH CLUSTERED PRE-CLEAN AND PRE-SURFACE NITRIDATION

GENEVA, Aug. 14 -- APPLIED MATERIALS, INC. filed a patent application (US2026/011800) for “EQUAL MATCHING OF OXIDATION RATE BETWEEN SIGE AND SI THROUGH CLUSTERED PRE-CLEAN AND PRE-SURFACE NITRIDATION”. With publication no. WO/2026/169430, here are the other details related to the patent application:

Kind: Initial Publication with ISR [A1]

IPC: H10P 14/60

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

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