GENEVA, April 20 -- ENTEGRIS, INC. (129 Concord RoadBillerica, Massachusetts 01821) filed a patent application (PCT/US2025/049708) for "COMPOSITIONS FOR INCREASING MATERIAL REMOVAL RATE OF SILICON CARBIDE AND RELATED METHODS" on Oct 06, 2025. With publication no. WO/2026/080397, the details related to the patent application was published on Apr 16, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): LI, Chenxuan (129 Concord Rd.Billerica, Massachusetts 01821), FANG, Stone Ray (129 Concord Rd.Billerica, Massachusetts 01821), JIN, Shengyu (129 Concord Rd.Billerica, Massachusetts 01821), HUANG, Hel...