GENEVA, June 19 -- SHENZHEN CSL VACUUM SCIENCE AND TECHNOLOGY CO., LTD. filed a patent application (CN2025/131791) for “DIGITAL IMPEDANCE MATCHING CIRCUIT AND PLASMA PROCESSING DEVICE”. With publication no. WO/2026/103547, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: H03H 11/28
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
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