GENEVA, July 27 -- CARL ZEISS SMT filed a patent application (EP2026/051040) for “DEVICE AND METHOD FOR PROCESSING A WORKPIECE WITH AN ION BEAM”. With publication no. WO/2026/154112, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: H01J 37/09
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
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