GENEVA, July 18 -- CARL ZEISS SMT GMBH filed a patent application (EP2026/050241) for “DEVICE AND METHOD FOR INTERFEROMETRICALLY MEASURING A WAVEFRONT OF A TEST OBJECT; METHOD FOR PRODUCING AN OPTICAL ELEMENT; LITHOGRAPHY SYSTEM”. With publication no. WO/2026/149969, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: G01B 9/02001
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
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