INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "TRANSPORT DEVICE, TRANSPORT SYSTEM AND METHOD FOR TRANSPORTING AN ELEMENT OF A SYSTEM FOR MICROLITHOGRAPHY"

GENEVA, Feb. 23 -- CARL ZEISS SMT GMBH (Rudolf-Eber-StraBe 273447 Oberkochen) filed a patent application (PCT/EP2025/073188) for "TRANSPORT DEVICE, TRANSPORT SYSTEM AND METHOD FOR TRANSPORTING AN ELEMENT OF A SYSTEM FOR MICROLITHOGRAPHY" on Aug 13, 2025. With publication no. WO/2026/037854, the details related to the patent application was published on Feb 19, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): WISSEL, Kurt Stephan (Rudolf-Eber-Strasse 273447 Oberkochen), PETASCH, Thomas (Rudolf-Eber-Strasse 273447 Oberkochen), LIEBAUG, Bjoern (Rudolf-Eber-Strasse 273447 Oberkochen), ZINNER, Chr...