GENEVA, March 30 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/076499) for "OPTICAL SYSTEM, LITHOGRAPHY APPARATUS AND METHOD FOR CONDITION MONITORING" on Sep 17, 2025. With publication no. WO/2026/062036, the details related to the patent application was published on Mar 26, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): HOFFMANN, Daniel Kai (Rudolf-Eber-Strasse 273447 Oberkochen), BECKER, Julian (Rudolf-Eber-Strasse 273447 Oberkochen), SESCHEK, Ralf (Rudolf-Eber-Strasse 273447 Oberkochen), KRONE, Stefan (Rudolf-Eber-Strasse 273447 Obe...