INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "OPTICAL SYSTEM, LITHOGRAPHY APPARATUS, METHOD FOR PRODUCING AN OPTICAL SYSTEM AND METHOD FOR DESIGNING A VIBRATION DAMPER OF AN OPTICAL SYSTEM"

GENEVA, March 23 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/075651) for "OPTICAL SYSTEM, LITHOGRAPHY APPARATUS, METHOD FOR PRODUCING AN OPTICAL SYSTEM, AND METHOD FOR DESIGNING A VIBRATION DAMPER OF AN OPTICAL SYSTEM" on Sep 09, 2025. With publication no. WO/2026/057575, the details related to the patent application was published on Mar 19, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): GORIUS, Thomas (Rudolf-Eber-Strasse 273447 Oberkochen)

Abstract: The invention relates to an optical system (200), comprising a component (202), a ...