GENEVA, May 4 -- CARL ZEISS SMT GMBH (Rudolf-Eber-StraBe 273447 Oberkochen) filed a patent application (PCT/EP2025/080121) for "MICROMIRROR ELEMENT, AND MICRO-ELECTROMECHANICAL SYSTEM COMPRISING A MICROMIRROR ELEMENT" on Oct 20, 2025. With publication no. WO/2026/087388, the details related to the patent application was published on Apr 30, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): STROBEL, Sebastian (Rudolf-Eber-StraBe 273447 Oberkochen), SAROV, Yanko (Rudolf-Eber-StraBe 273447 Oberkochen)
Abstract: The invention relates to a micromirror element (200), as can be used in micro-electro...