GENEVA, March 30 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/075877) for "METHOD FOR PRODUCING AN OPTICAL COMPONENT, OPTICAL COMPONENT AND SEMICONDUCTOR TECHNOLOGY APPARATUS" on Sep 11, 2025. With publication no. WO/2026/061867, the details related to the patent application was published on Mar 26, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): FAAS, Sebastian (Rudolf-Eber-Strasse 273447 Oberkochen), SCHUETTER, Stefan (Rudolf-Eber-Strasse 273447 Oberkochen), OBERT, Felix (Rudolf-Eber-Strasse 273447 Oberkochen)
Abstract: The inventio...