GENEVA, March 9 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Str. 273447 Oberkochen) filed a patent application (PCT/EP2025/074573) for "METHOD FOR PRODUCING A REFLECTIVE OPTICAL ELEMENT" on Aug 28, 2025. With publication no. WO/2026/047155, the details related to the patent application was published on Mar 05, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): KOCH, Philip (Rudolf-Eber-Str. 273447 Oberkochen), ENKISCH, Hartmut (Rudolf-Eber-Str. 273447 Oberkochen)
Abstract: The invention relates to a method for producing a reflective optical element for a working wavelength, in particular in the EUV wa...