GENEVA, March 30 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/075590) for "METHOD FOR MECHATRONICALLY QUALIFYING THE OPTICAL SYSTEM OF A SEMICONDUCTOR TECHNOLOGY INSTALLATION" on Sep 09, 2025. With publication no. WO/2026/061820, the details related to the patent application was published on Mar 26, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): TREUBEL, Frank (Rudolf-Eber-Strasse 273447 Oberkochen), KIESSLING, Peter (Rudolf-Eber-Strasse 273447 Oberkochen), VOLKMER, Kevin (Rudolf-Eber-Strasse 273447 Oberkochen), WUNDER, Nina (Rudolf-E...