GENEVA, April 5 -- CARL ZEISS SMT GMBH (Rudolf-Eber-StraBe 273447 Oberkochen) filed a patent application (PCT/EP2025/076950) for "METHOD FOR EXCHANGING OPTICAL ELEMENTS OF AN APPARATUS FOR SEMICONDUCTOR TECHNOLOGY" on Sep 22, 2025. With publication no. WO/2026/068380, the details related to the patent application was published on Apr 02, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): HOFMAIER, Andreas (Rudolf-Eber-StraBe 273447 Oberkochen)
Abstract: The invention relates to a method for exchanging optical elements (25) of an apparatus for semiconductor technology, the optical elements bein...