INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "METHOD AND DEVICE FOR THE INSPECTION OF SEMICONDUCTOR SUBSTRATES"

GENEVA, May 10 -- CARL ZEISS SMT GMBH (Rudolf-Eber-StraBe 273447 Oberkochen) filed a patent application (PCT/EP2025/081127) for "METHOD AND DEVICE FOR THE INSPECTION OF SEMICONDUCTOR SUBSTRATES" on Oct 28, 2025. With publication no. WO/2026/093298, the details related to the patent application was published on May 07, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): MATEJKA, Ulrich (Carl-Zeiss-Promenade 1007745 Jena), HETZLER, Jochen (Rudolf-Eber-StraBe 273447 Oberkochen), ROEDER, Robert (Carl-Zeiss-Promenade 107745 Jena), SCHMIDT, Carsten (Carl-Zeiss-Promenade 107745 Jena), WERSCHNIK, Jan (C...