GENEVA, Feb. 23 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/070344) for "MANIPULABLE PLATFORM FOR MOUNTING A CAMERA ON A VACUUM HOUSING, MASK INSPECTION APPARATUS AND METHOD FOR ADJUSTING A MASK INSPECTION APPARATUS" on Jul 16, 2025. With publication no. WO/2026/037568, the details related to the patent application was published on Feb 19, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): REICHMANN, Lutz (Carl-Zeiss-Promenade 107745 Jena)
Abstract: The invention relates to a manipulable platform for mounting a camera on a vacuum housin...