GENEVA, March 30 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/073440) for "INTERFEROMETRIC TEST ARRANGEMENT FOR TESTING THE SURFACE SHAPE OF A TEST OBJECT" on Aug 15, 2025. With publication no. WO/2026/061702, the details related to the patent application was published on Mar 26, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): HETZLER, Jochen (Rudolf-Eber-Strasse 273447 Oberkochen)
Abstract: The invention relates to an interferometric test arrangement for testing the surface shape of a test object, comprising an illumination device (1...