GENEVA, April 27 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/079606) for "GAS SUPPLY DEVICE AND APPARATUS AND METHOD FOR PARTICLE BEAM-INDUCED PROCESSING OF A SAMPLE" on Oct 14, 2025. With publication no. WO/2026/082721, the details related to the patent application was published on Apr 23, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): RHINOW, Daniel (Industriestrasse 164380 Rossdorf)
Abstract: A gas supply device (100) for an apparatus (200) for particle beam-induced processing of a sample (202), comprising a liquid container (102...