GENEVA, April 8 -- CARL ZEISS MULTISEM GMBH (Carl-Zeiss-StraBe 2273447 Oberkochen) filed a patent application (PCT/EP2025/077448) for "ELEMENT EXCHANGE IN VACUUM CHAMBER OF A MULTI-BEAM CHARGED PARTICLE MICROSCOPE" on Sep 25, 2025. With publication no. WO/2026/068599, the details related to the patent application was published on Apr 02, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): BOROVIK, Alexander (Rudolf-Eber-Strasse 273447 Oberkochen), KELP, Michael (Rudolf-Eber-Strasse 273447 Oberkochen), JACOBI, Joerg (Rudolf-Eber-Strasse 273447 Oberkochen)
Abstract: For maintenance of a charged-p...