International Patent: CARBON NANOTUBE SELF-SUPPORTING FILM, PELLICLE, EXPOSURE ORIGINAL PLATE WITH PELLICLE, METHOD FOR PRODUCING THESE, EXPOSURE METHOD, METHOD FOR PRODUCING SEMICONDUCTOR DEVICE, AND METHOD FOR PRODUCING LIQUID CRYSTAL DISPLAY PLATE

GENEVA, Oct. 22 -- SHIN-ETSU CHEMICAL CO., LTD. filed a patent application (JP2026/015100) for “CARBON NANOTUBE SELF-SUPPORTING FILM, PELLICLE, EXPOSURE ORIGINAL PLATE WITH PELLICLE, METHOD FOR PRODUCING THESE, EXPOSURE METHOD, METHOD FOR PRODUCING SEMICONDUCTOR DEVICE, AND METHOD FOR PRODUCING LIQUID CRYSTAL DISPLAY PLATE”. With publication no. WO/2026/221016, here are the other details related to the patent application:

Kind: Initial Publication with ISR [A1]

IPC: G03F 1/62

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

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