INTERNATIONAL PATENT: BROOKS AUTOMATION US, LLC FILES APPLICATION FOR "MAGNETIC LEVITATION THERMAL MANAGEMENT SYSTEM AND METHOD"

GENEVA, March 11 -- BROOKS AUTOMATION US, LLC (15 Elizabeth DriveChelmsford, MA 01824) filed a patent application (PCT/US2025/044466) for "MAGNETIC LEVITATION THERMAL MANAGEMENT SYSTEM AND METHOD" on Sep 02, 2025. With publication no. WO/2026/050758, the details related to the patent application was published on Mar 05, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): MOURA, Jairo T. (93 Brigham StreetMarlborough, MA 01752), TSANG, Vincent W. (31 Hillside RoadLincoln, MA 01773)

Abstract: A semiconductor substrate transport apparatus includes a vacuum chamber, an array of electromagnets, a su...