INTERNATIONAL PATENT: BROOKS AUTOMATION US, LLC FILES APPLICATION FOR "LOAD LOCK AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE LOAD LOCK"

GENEVA, March 11 -- BROOKS AUTOMATION US, LLC (15 Elizabeth DriveChelmsford, MA 01824) filed a patent application (PCT/US2025/044188) for "LOAD LOCK AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE LOAD LOCK" on Aug 29, 2025. With publication no. WO/2026/050640, the details related to the patent application was published on Mar 05, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): CAVENEY, Robert, T. (14 Field RoadWindham, NH 03087), TSANG, Vincent, W. (31 Hillside RoadLincoin, MA 01773), BABBS, Daniel (2008 Mistywood DriveAustin, TX 78746), MAY, Chris (15 Elizabeth DriveChelmsford, MA 01824),...