GENEVA, April 5 -- BROOKS AUTOMATION (GERMANY) GMBH (Daimlerstrasse 778256 SteiBlingen) filed a patent application (PCT/EP2025/065072) for "SEMICONDUCTOR FABRICATION TOOL, LOAD PORT FOR AND METHOD OF OPERATING SUCH A TOOL" on May 30, 2025. With publication no. WO/2026/068018, the details related to the patent application was published on Apr 02, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): SCHWETZ, Michael (Haldenstrasse 818400 Winterthur), FENNER, Yves (Alpsteinstr. 2b8572 Berg)
Abstract: The invention provides a semiconductor fabrication tool, particularly a stocker, (100) for processi...