GENEVA, July 1 -- ENTEGRIS, INC. filed a patent application (US2025/058852) for “BISMUTH PRECURSORS FOR EUV FILM PROCESSES”. With publication no. WO/2026/128518, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: C07F 9/94
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
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