INTERNATIONAL PATENT: BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD., 北京北方华创微电子装备有限公司 FILES APPLICATION FOR "TEMPERATURE CONTROL METHOD FOR WAFER BEARING APPARATUS AND SEMICONDUCTOR PROCESS DEVICE"

GENEVA, May 9 -- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD. (NO.8 Wenchang Avenue, Beijing Economic-Technological Development AreaDaxing District, Beijing 100176), 北京北方华创微电子装备有限公司 (中国北京市大兴区北京经济技术开发区文昌大道8号) filed a patent application (PCT/CN2025/128950) for "TEMPERATURE CONTROL METHOD FOR WAFER BEARING APPARATUS, AND SEMICONDUCTOR PROCESS DEVICE" on Oct 21, 2025. With publication no. WO/2026/092232, the details related to the patent application was published on May 07, 2026.

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