INTERNATIONAL PATENT: BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD., 北京北方华创微电子装备有限公司 FILES APPLICATION FOR "GAS DETECTION CURVE SMOOTHING METHOD, CLEANING CONTROL METHOD, ELECTRONIC DEVICE AND SEMICONDUCTOR PROCESS DEVICE"

Posted On: 2026-04-27

GENEVA, April 27 -- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD. (No.8 Wenchang AvenueBeijing Economic-Technological Development AreaDaxing District, Beijing 100176), 北京北方华创微电子装备有限公司 (中国北京市大兴区北京经济技术开发区文昌大道8号) filed a patent application (PCT/CN2025/121315) for "GAS DETECTION CURVE SMOOTHING METHOD, CLEANING CONTROL METHOD, ELECTRONIC DEVICE, AND SEMICONDUCTOR PROCESS DEVICE" on Sep 15, 2025. With publication no. WO/2026/081757, the details related to the patent application was publ...

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INTERNATIONAL PATENT: BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD., 北京北方华创微电子装备有限公司 FILES APPLICATION FOR "GAS DETECTION CURVE SMOOTHING METHOD, CLEANING CONTROL METHOD, ELECTRONIC DEVICE AND SEMICONDUCTOR PROCESS DEVICE"