International Patent: AUTOMATIC CALIBRATION METHOD AND APPARATUS FOR POSITION OF WAFER, AND CHARGED PARTICLE BEAM APPARATUS

GENEVA, July 1 -- ANGSTROM PRECISION INSTRUMENTS CORP. filed a patent application (CN2025/133792) for “AUTOMATIC CALIBRATION METHOD AND APPARATUS FOR POSITION OF WAFER, AND CHARGED PARTICLE BEAM APPARATUS”. With publication no. WO/2026/124080, here are the other details related to the patent application:

Kind: Initial Publication with ISR [A1]

IPC: G01N 23/2204

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Disclaimer: Curated by HT Syndication....