INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "RETICLE HANDLER APPARATUS, LITHOGRAPHIC APPARATUS INCLUDING RETICLE HANDLER APPARATUS AND METHOD"

GENEVA, May 4 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/078885) for "RETICLE HANDLER APPARATUS, LITHOGRAPHIC APPARATUS INCLUDING RETICLE HANDLER APPARATUS, AND METHOD" on Oct 07, 2025. With publication no. WO/2026/087228, the details related to the patent application was published on Apr 30, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): VAN DONGEN, Paul (P.O. Box 3245500 AH Veldhoven)

Abstract: Embodiments herein describe methods, devices, and systems for a reticle gripper. The disclosure provides a reticle handler apparatus comprising...