INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "RETICLE GRIPPER, RETICLE EXCHANGE DEVICE, EXPOSURE APPARATUS AND RETICLE GRIPPING METHOD"

GENEVA, March 30 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/073613) for "RETICLE GRIPPER, RETICLE EXCHANGE DEVICE, EXPOSURE APPARATUS AND RETICLE GRIPPING METHOD" on Aug 18, 2025. With publication no. WO/2026/061711, the details related to the patent application was published on Mar 26, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SHEKHAR, Shivang (77 Danbury RoadWilton, Connecticut 06897), WIENER, Roberto B. (P.O. Box 3245500 AH Veldhoven)

Abstract: Embodiments herein describe a gripper is configured to support an item in an exposure ...