INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METROLOGY METHOD AND ASSOCIATED METROLOGY AND EXPOSURE APPARATUSES"

GENEVA, March 9 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/070654) for "METROLOGY METHOD AND ASSOCIATED METROLOGY AND EXPOSURE APPARATUSES" on Jul 18, 2025. With publication no. WO/2026/046586, the details related to the patent application was published on Mar 05, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): TINNEMANS, Patricius, Aloysius, Jacobus (P.O. Box 3245500 AH Veldhoven), MEHTA, Nikhil (77 Danbury RoadWilton, Connecticut 06897), ROSCHER, Dietrich (77 Danbury RoadWilton, Connecticut 06897)

Abstract: Disclosed is a method of metr...