GENEVA, April 18 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/077055) for "METHOD AND SENSOR SYSTEM" on Sep 22, 2025. With publication no. WO/2026/077703, the details related to the patent application was published on Apr 16, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): VAN DIJK, John, Godefriedus, Louisa (P.O. Box 3245500 AH Veldhoven), GALEOTTI, Federico (P.O. Box 3245500 AH Veldhoven)
Abstract: There is provided a method for determining a property of an illumination system, the method comprising: using the illumination system to illum...