GENEVA, April 18 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/076098) for "HUMIDIFICATION OF LOW GAS FLOWS" on Sep 12, 2025. With publication no. WO/2026/077650, the details related to the patent application was published on Apr 16, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): TIJSSEN, Edwin, Petrus, Alois, Maria (P.O. Box 3245500 AH Veldhoven), LIN, Yu-Ting (P.O. Box 3245500 AH Veldhoven), VAN DUUREN, Joris, Egidius, Pieter (P.O. Box 3245500 AH Veldhoven), JANSSEN, Franciscus, Johannes, Joseph (P.O. Box 3245500 AH Veldhoven)
Abstract: A...