GENEVA, May 18 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/079782) for "ELECTROSTATIC OBJECT SUPPORT AND METHODS OF MANUFACTURE THEREOF" on Oct 15, 2025. With publication no. WO/2026/098922, the details related to the patent application was published on May 15, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): SCHMIDT, Volker (P.O. Box 3245500 AH Veldhoven)
Abstract: Disclosed is an electrostatic object support for supporting an object. The electrostatic object support comprises a base layer; an electrode on said base layer and at least one ...