INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "CHARGED PARTICLE-OPTICAL DEVICE AND METHOD OF ASSESSING."

GENEVA, April 13 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/077942) for "CHARGED PARTICLE-OPTICAL DEVICE AND METHOD OF ASSESSING." on Sep 30, 2025. With publication no. WO/2026/073905, the details related to the patent application was published on Apr 09, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): WIELAND, Marco, Jan-Jaco (P.O. Box 3245500 AH Veldhoven)

Abstract: A charged particle-optical device configured to direct a plurality of charged particle beams along respective beam paths towards a sample surface, the charged particle-optic...