INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "CHARGED PARTICLE-OPTICAL ARRANGEMENT FOR A CHARGED PARTICLE BEAM APPARATUS."

GENEVA, May 4 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/077795) for "CHARGED PARTICLE-OPTICAL ARRANGEMENT FOR A CHARGED PARTICLE BEAM APPARATUS." on Sep 29, 2025. With publication no. WO/2026/087168, the details related to the patent application was published on Apr 30, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): WANG, Shih-Chi (P.O. Box 3245500 AH Veldhoven), KRECINIC, Faruk (P.O. Box 3245500 AH Veldhoven), MANGNUS, Albertus, Victor, Gerardus (P.O. Box 3245500 AH Veldhoven)

Abstract: The present disclosure relates to a charged parti...