GENEVA, March 2 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/070620) for "A METHOD FOR MODELING METROLOGY DATA OVER A SUBSTRATE AREA AND ASSOCIATED APPARATUSES" on Jul 18, 2025. With publication no. WO/2026/041317, the details related to the patent application was published on Feb 26, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): BRINKHOF, Ralph (P.O. Box 3245500 AH Veldhoven), MEGENS, Henricus, Johannes, Lambertus (P.O. Box 3245500 AH Veldhoven), BIJNEN, Franciscus, Godefridus, Casper (P.O. Box 3245500 AH Veldhoven)
Abstract: Disclosed i...