GENEVA, Aug. 7 -- CARL ZEISS MULTISEM GMBH filed a patent application (EP2026/051756) for “ARRANGEMENT FOR DEFORMATION-REDUCED MOUNTING OF A MICRO-OPTICAL UNIT FOR A MULTIPLE PARTICLE BEAM SYSTEM, MULTIPLE PARTICLE BEAM SYSTEM AND METHOD”. With publication no. WO/2026/162410, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: H01J 37/09
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
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