International Patent: ARBITRARY SCAN PATH TARGETING IN A SCANNING ELECTRON MICROSCOPE WITH HIGH PRECISION AND HIGH THROUGHPUT

GENEVA, Oct. 15 -- CARL ZEISS MULTISEM GMBH filed a patent application (EP2026/060341) for “ARBITRARY SCAN PATH TARGETING IN A SCANNING ELECTRON MICROSCOPE WITH HIGH PRECISION AND HIGH THROUGHPUT”. With publication no. WO/2026/215421, here are the other details related to the patent application:

Kind: Initial Publication with ISR [A1]

IPC: H01J 37/147

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

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