INTERNATIONAL PATENT: APPLIED MATERIALS, INC. FILES APPLICATION FOR "MULTI-STATION SUBSTRATE PROCESSING CHAMBER WITH PRECISE TEMPERATURE AND FLOW CONTROL"

GENEVA, Feb. 24 -- APPLIED MATERIALS, INC. (3050 Bowers AvenueSanta Clara, California 95054) filed a patent application (PCT/US2025/040896) for "MULTI-STATION SUBSTRATE PROCESSING CHAMBER WITH PRECISE TEMPERATURE AND FLOW CONTROL" on Aug 06, 2025. With publication no. WO/2026/039254, the details related to the patent application was published on Feb 19, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): ODE, Rohit (3050 Bowers AvenueSanta Clara, California 95054)

Abstract: Multiple station substrate processing chambers and methods are provided comprising four spatially separated substrate proc...