INTERNATIONAL PATENT: APPLIED MATERIALS, INC. FILES APPLICATION FOR "FILM STACK FOR EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY WITH REFLOWABLE UNDERLAYER"

GENEVA, April 29 -- APPLIED MATERIALS, INC. (3050 Bowers AvenueSanta Clara, CA 95054) filed a patent application (PCT/US2025/049437) for "FILM STACK FOR EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY WITH REFLOWABLE UNDERLAYER" on Oct 03, 2025. With publication no. WO/2026/084891, the details related to the patent application was published on Apr 23, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): WOJTECKI, Rudy (1140 E. Arques AvenueSunnyvale, CA 94085), KAZEM, Nasrin (3050 Bowers AvenueSanta Clara, CA 95054)

Abstract: Embodiments described herein relate to a method of developing a resist layer on ...