INTERNATIONAL PATENT: APPLIED MATERIALS, INC. FILES APPLICATION FOR "ACTIVE SIC HEATING WITH ZONALITY CONTROL FOR EPI CHAMBER THERMAL PROFILE ADJUSTING"

GENEVA, March 11 -- APPLIED MATERIALS, INC. (3050 Bowers AvenueSanta Clara, California 95054) filed a patent application (PCT/US2025/044072) for "ACTIVE SIC HEATING WITH ZONALITY CONTROL FOR EPI CHAMBER THERMAL PROFILE ADJUSTING" on Aug 28, 2025. With publication no. WO/2026/050578, the details related to the patent application was published on Mar 05, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): CONG, Zhepeng (c/o Applied Materials, Inc., Law Dept., M/S 12693050 Bowers AvenueSanta Clara, California 95054)

Abstract: A processing chamber includes a chamber body, a lid disposed over the ch...