GENEVA, Sept. 18 -- GSEC GERMAN SEMICONDUCTOR EQUIPMENT filed a patent application (EP2026/054952) for “APPARATUS AND METHOD FOR CLEANING POT-SHAPED HOLLOW BODIES, IN PARTICULAR TRANSPORT CONTAINERS FOR SEMICONDUCTOR WAFERS OR FOR EUV LITHOGRAPHY MASKS”. With publication no. WO/2026/185042, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: H10P 72/10
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
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