Canon to launch mercury-free light source option for FPD lithography
United States, Aug. 26 -- Canon Inc. announced a new mercury-free light source option for its MPAsp-H1003H FPD lithography system. The option, scheduled for release in early September, replaces conventional mercury-lamp light sources with LEDs.The LED option offers longer service life, lower power consumption, and at least 40% higher illumination intensity, enabling shorter exposure cycle times. It also eliminates at least 1 kilogram of annual mercury waste per system. Initially available for newly installed MPAsp-H1003H systems, the option will later be offered as a paid upgrade for existing systems and made available for additional models.Under standard operating conditions, the LED light source has a service life of 20,000 hours, compare...
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