Japan, Aug. 24 -- MITSUBISHI HEAVY IND LTD has got intellectual property rights for 'X-RAY MASK, METHOD FOR MANUFACTURING THE SAME, DEFECT DETECTION METHOD, AND LAMINATION MODELING DEVICE.' Other related details are as follows:

Application Number: JP,2023-050949

Category (FI): G21K5/02@X,G01T7/00@B,G01T7/00@A,G21K1/00@X,G01N23/203

Stage: Grant (IP right granted following substantive examination.)

Filing Date: March 28, 2023

Publication Date: Oct. 10, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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