Japan, June 10 -- SHIBAURA MECHATRONICS CORP has got intellectual property rights for 'WAFER PROCESSING DEVICE.' Other related details are as follows:

Application Number: JP,2022-056858

Category (FI): H10P50/60@J,H01L21/306@K,H01L21/68@N,H01L21/304,643@A,H01L21/304,648@A,H10P72/70,H10P70/00,108@A,H10P70/00,103@A

Stage: Grant (IP right granted following substantive examination.)

Filing Date: March 30, 2022

Publication Date: Oct. 13, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....