Japan, Oct. 5 -- TOKYO ELECTRON LTD has got intellectual property rights for 'TRANSFER ARM AND SUBSTRATE TRANSFER DEVICE.' Other related details are as follows:
Application Number: JP,2022-172728
Category (FI): H01L21/68@B,H10P72/30@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Oct. 27, 2022
Publication Date: July 25, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....