Japan Intellectual Property Rights: THIN FILM MANUFACTURING METHOD, AND THIN FILM MANUFACTURING APPARATUS

Japan, May 13 -- SOULBRAIN HOLDINGS CO LTD has got intellectual property rights for 'THIN FILM MANUFACTURING METHOD, AND THIN FILM MANUFACTURING APPARATUS.' Other related details are as follows:

Application Number: JP,2020-001131

Category (FI): C23C16/40,H01L21/285@C,C23C16/455,H01L21/316@X,H01L21/318@B,H01L21/28,301@R,H10P14/694@B,H10P14/692@X,H10P14/43,C23C16/14,C23C16/34

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Jan. 8, 2020

Publication Date: April 1, 2021

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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